Academic Courses

Engineering

ENGR 102
Engineering Design and Laboratory I
2-4-4
Engineering 102 provides for the devel-opment of analytical and communication skills by problem solving, teamwork and project presentation. The course gives instruction on how to use computers in engineering: how to utilize engineering software, problem solving, data acquisition and analysis. Included is how to use a computer algebra system to solve math and engineering problems. Students learn the elements of the engineering design process through execution of actual design projects. Other topics include an introduction to patents and patent law and the interaction between the engineer and physical environment. Offered only in the Fall semester. Prerequisite: MATH 162 or a higher-level math course. Additional course fee: $66.

ENGR 202
Engineering Design and Laboratory II
2-4-4
This course is a continuation of Engineering Design and Laboratory I. It provides for the development of analytical and communication skills by problem solving, teamwork and project presentation. The course gives instruc-tion on how to use computers in engineering: how to utilize engineering software, problem solving, data acquisition and analysis. In addition, students learn technical sketching and computer-aided drafting techniques with industry-standard software. Students learn the elements of the engineering design process through execution of actual design projects. Offered only in the Spring semester. Prerequisite: ENGR 102. Additional course fee: $66.

ENGR 205
Materials Engineering
3-2-4
In this course, students will be taught to recognize and differentiate between the several types of engineering solids, understand solids at the atomic level in terms of bonding and energy, establish a quantitative picture of the structure of crystalline and non-crystalline solids, explain atomic movements in solids using the concept of diffusion, explain the electrical and magnetic properties of different kinds of materials, and understand the processes that give rise to degradation of materials. They will also learn to interpret the optical behavior of materials in terms of the interaction of electromagnetic radiation with the material, and choose materials optimally for engineering design purposes. Offered only in the Spring semester. Prerequisites: PHYS 241, MATH 172. Additional course fee: $66.

ENGR 210
Nanofabrication Manufacturing Technology Seminar
2-0-0-2
This course gives students an overview of typical nanofabrication applications, and provides an introduction to basic nanofabrication manufacturing technology fabrication process and related terminology, as well as an introduction to basic concepts of statistical process control. Prerequisite: MATH 118.

ENGR 211
Material, Safety & Equipment Overview for Nanofabrication
2-2-3
This course provides students with an overview of equipment and materials utilized in nanofabrication processes, as well as a review of safety factors related to both equipment and materials. The focus is on procedural, environmental, safety and health issues in equipment operation and material handling. Prerequisites: ENGR 210, ENGR 212 (which must be taken concurrently) and Department Head approval.

ENGR 212
Basic Nanofabrication Processes
2-2-3
This course provides students with an overview of the basic processing steps in nanofabrication and the equipment processes needed to fabricate devices and structures. Processing flow will be examined for structures such as microelectromechanical (MEM) devices, biomedical “lab-on-a-chip” structures, display devices and microelectronic devices, including diode, transistor and full CMOS structures. Prerequisites: ENGR 210, ENGR 211 (which must be taken concurrently) and Department Head approval.

ENGR 213
Thin Films in Nanofabrication
2-2-3
This course will cover thin film deposition and etching practices in nanofabrication. The deposition techniques covered will include atmospheric, low pressure, and plasma enhanced chemical vapor deposition. Materials to be considered will include dielectrics, polysilicon, metals, adhesion promoters and diffusion barriers. The second part of the course will focus on etching processes and will emphasize reactive ion etching, high-ion-density reactors, ion beam etching and wet chemical etching. Prerequisites: ENGR 210, and ENGR 211, ENGR 212 (which may be taken concurrently), and ENGR 214 (which must be taken concurrently) and Department Head approval.

ENGR 214
Lithography for Nanofabrication
2-2-3
This course will cover all aspects of lithography from design and mask fabrication to pattern transfer and inspection. Topics covered will include substrate preparation, the nature and behavior of photoresist materials, exposure, optical masks, aligners, steppers, scanners, control of critical dimensions and profiles, and advanced optical lithography techniques. Prerequisites: ENGR 210, and ENGR 211, ENGR 212 (which may be taken concurrently), and ENGR 213 (which must be taken concurrently) and Department Head approval.

ENGR 215
Materials Modification in Nanofabrication
2-2-3
This course will explore in detail the process steps used in, modifying material properties nanofabrication. Included will be growth and annealing processes utilizing horizontal and vertical furnaces as well as rapid thermal annealing. The impact of thermal processing on defects, impurities and overall electrical, mechanical, optical, and chemical properties will be studied. The student will grow and measure gate and field oxides, implant and activate source and drain regions, and evaluate thermal budget requirements, using state-of-the-art tools. Ion implantation, diffusion and surface preparation and treatment will also be covered. Prerequisites: ENGR 210, and ENGR 211, ENGR 212, ENGR 213, ENGR 214 (which may be taken concurrently), and ENGR 216 (which must be taken concurrently) and Department Head approval.

ENGR 216
Characterization, Packaging and Testing of Nanofabrication Structures
2-2-3
This course will examine a variety of techniques and measurements essential for controlling device fabrication and final packaging. Monitoring and characterization techniques will be discussed. Basic electrical measurements on device structures for yield analysis and process control will also be stressed. In addition, the course will examine mechanical and electrical characteristics of simple MEMS devices, and chemical and biological responses of nano-fabricated biomedical structures. Students will also learn abut the manufacturing issues involved in topics such as interconnects, isolation and final device assembly. Prerequisites: ENGR 210, and ENGR 211, ENGR 212, ENGR 213, ENGR 214 (which may be taken concurrently), and ENGR 215 (which must be taken concurrently) and Department Head approval.

ENGR 221
Statics
3-0-3
Principles of mechanics: review of vector operations; vector treatment of force systems.?Analysis of trusses and frames. Centroids; moments of inertia; friction; virtual work. Offered only in the Fall semester. Prerequisites: PHYS 140, MATH 172.?

ENGR 222
Dynamics
3-0-3
Kinematics and kinetics of particles and rigid bodies.?Work-energy; impulse-momentum. Mechanical vibrations. Offered only in the Spring semester. Prerequisites: ENGR 221, MATH 271.